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Chemical Vapor Deposition of Aluminum Oxide Thin Films Using a Low-cost Direct Liquid Injection Delivery System: An Educational Laboratory Experiment
by Serrano Pérez Edgar, Serrano Pérez Javier, José Manuel Juárez García and Juárez López Fernando
World Journal of Chemical Education. 2016, 4(4), 76-79. DOI: 10.12691/wjce-4-4-2
Pub. Date: July 15, 2016Views: 24011Downloads: 23816
direct liquid injection chemical vapor deposition alumina
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