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Using the Effect of Mechanical Stress on Doped Silicon as an Angular Movement Sensor for MOEMS/MEMS Micro Mirrors

by D. Berko and Y.S. Diamand

American Journal of Electrical and Electronic Engineering. 2014, 2(3), 88-91. DOI: 10.12691/ajeee-2-3-5
Pub. Date: May 02, 2014Views: 17448 Downloads: 13509Like: 36

mechanical stress MOEMS/MEMS angular movement sensor

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