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Using the Effect of Mechanical Stress on Doped Silicon as an Angular Movement Sensor for MOEMS/MEMS Micro Mirrors
by D. Berko and Y.S. Diamand
American Journal of Electrical and Electronic Engineering. 2014, 2(3), 88-91. DOI: 10.12691/ajeee-2-3-5
Pub. Date: May 02, 2014Views: 17448Downloads: 13506
mechanical stress MOEMS/MEMS angular movement sensor
Abstract Full Text PDF (358 KB) Full Text HTML Full Text ePUB (632 KB)
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