Influence of Growth Parameters on the Structural, Morphological and optical Properties of Mg_xZn_1-xO Prepared by Metal Organic Chemical Vapor Deposition

K. Talla^{1, 2,} , O. Sakho¹, P. D. Tall¹, C. B. Ndao¹, E. H. O. Gueye¹, M. B. Gaye¹, J. K. Dangbegnon², B. D. Ngom^1, , J. R. Botha² and A. C. Beye¹

¹Groupe de physique du Solide et Sciences des Matériaux, Faculté des Sciences et Techniques Université Cheikh Anta Diop de Dakar (UCAD), B.P. 25114 Dakar-Fann Dakar (Sénégal)

²Nelson Mandela Metropolitan University, PO Box 77000, Port Elizabeth, 6031, South Africa

Cite this paper:
K. Talla, O. Sakho, P. D. Tall, C. B. Ndao, E. H. O. Gueye, M. B. Gaye, J. K. Dangbegnon, B. D. Ngom, J. R. Botha and A. C. Beye. Influence of Growth Parameters on the Structural, Morphological and optical Properties of Mg_xZn_1-xO Prepared by Metal Organic Chemical Vapor Deposition. American Journal of Materials Science and Engineering. 2016; 4(2):20-25. doi: 10.12691/ajmse-4-2-1

Abstract

The influence of growth parameters on the structural, morphological and optical properties of Mg_xZn_1-xO grown on sapphire substrate by metal organic chemical vapor deposition is studied. Pure oxygen gas is used as oxidant, bis-methyl-cyclopentadienyl magnesium ((MeCp)₂Mg) and diethyl zinc are used as Mg and Zn source, respectively. The growth temperature between and 320°C and 620°C, the VI/II (O/Mg, Zn) ratio ranging from 60 to 960 and the growth rate from 0.5 to 3.3 m/h, are systematically varied to determine their effects upon the above mentioned physical properties. Structural, morphological and optical properties of the thin films are characterized by means of X-Ray Diffraction (XRD), Scanning Electron Microscope (SEM) and Photoluminescence (PL). Experimental results indicate that the growth conditions are essential for engineering the growth of Mg_xZn_1-xO. The optimum substrate temperature is found to be 420°C for the growth of Mg_xZn_1-xO with a solid composition x below 30%, composition above which a phase segregation has been previously observed. With increasing temperature, strong parasitic reaction between (MeCp)₂Mg and oxygen is found to occur before they rich the substrate.

Keywords:
MgZnO ternary alloys MOCVD bis-methyl-cyclopentadienyl magnesium ((MeCp)2Mg) Columnar growth

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