Preparation and Characterization of Vanadium Pentoxide by DC-Magnetron Sputtering

Mohammed. K. Kalaf¹, Sabri. J. Mohammed² and Mohammed. Sh. Muhammed^3,

¹Ministry of Sciences and Technology, Baghdad, Republic of Iraq

²Tikrit University, Physics Department, Tikrit, Republic of Iraq

³Education Mission, Education Department, Salah al-Din, Iraq

Cite this paper:
Mohammed. K. Kalaf, Sabri. J. Mohammed and Mohammed. Sh. Muhammed. Preparation and Characterization of Vanadium Pentoxide by DC-Magnetron Sputtering. Applied Mathematics and Physics. 2019; 7(1):1-7. doi: 10.12691/amp-7-1-1

Abstract

In this work, the structural properties of the monocrystalline vanadium pentoxide have been presented. Vanadium pentoxide (V₂O₅) films were deposited by using a DC reactive magnetron sputtering system at a working pressure of 8.5x10^-2mbar.The sputtered vanadium atoms were sputtered and oxidized in presence O₂:Ar gas mixture by (5/95,10/90, 20/80,30/70,50/50). Employment of magnetron results in the formation of V₂O₅ in the final samples according to the XRD analysis, increase the roughness and hence surface area of the produced V₂O₅ nanostructures. The results of X-rays are shown to us, the deposited films were formed by nanoparticles with an average grain size in the range of (52.11nm to 98.03) nm and roughness Ave (nm) in the range of (1.04nm to 8.88nm). The deposited films are identified to be polycrystalline nature with a cubic structure along ((001), (111)) and ((200)) orientation also MonoV2O5, Cub VO were found as deposited. The texture of the films was observed using SEM and AFM, it was observed that the grain size was increased with increasing the O₂ percentage. These improvements in the structural properties of the produced vanadium pentoxide make these nanostructures good candidates for specific applications, such as photo detectors, solar cells, electro chromic smart window and gas sensor.

Keywords:
magnetron sputtering vanadium structural properties

This work is licensed under a Creative Commons Attribution 4.0 International License. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

References:

[1]	Schneider K, 2015. Structural and optical properties of VOx thin films. Archives of Metallurgy and Materials. 60.2 957-961‏
[2]	Golan G et al, 2004. Investigation of phase transition mechanism in vanadium oxide thin films. Journal of Optoelectronics and Advanced Materials. 6.1 189-195.
[3]	Warwick, M. E, & Binions, R, 2014. Advances in thermochromic vanadium dioxide films. Journal of Materials Chemistry. A 2.10 3275-3292.
[4]	Donev Eugenii U, 2008. Metal-semiconductor transitions in nanoscale vanadium dioxide-thin films, subwavelength holes, and nanoparticles PhD Thesis‏.
[5]	Liu Yueyan et al, 2016. Effect of annealing temperature on the structure and properties of vanadium oxide films. Optical Materials Express. 6.5 1552-1560.
[6]	Zou Mengyang, 2015. Deposition Methods and Thermoresistive Properties of Vanadium Oxide and Amorphous Silicon Thin Films PhD Thesis. University of Dayton.
[7]	M Farahmandjou, 2017. Chemical Synthesis of Vanadium Oxide (V2O5) Nanoparticles Prepared by Sodium Metavanadate. J. Nanomedicine Res. 5.1 2-5.
[8]	Lamsal Chiranjivi Ravindran M, 2013. Optical properties of vanadium oxides-an analysis. Journal of materials science. 48.18 6341-6351.
[9]	Urena Begara, Ferran Crunteanu, Aurelian Raskin, Jean-Pierre, 2017. Raman and XPS characterization of vanadium oxide thin films with temperature. Applied Surface Science. 403 717-727‏.
[10]	Vijayakumar Yelsani et al, 2015. Influence of the substrate temperature on the structural, optical and thermoelectric properties of sprayed V2O5 thin films. Material in technologies .49.2 17‏.
[11]	Ramplberg Geert et al, 2015. In situ X-ray diffraction study of the controlled oxidation and reduction in the V–O system for the synthesis of VO2 and V2O3 thin films. Journal of Materials Chemistry .C3 43 11357-11365‏.
[12]	Jeong Jaewoo et al, 2013. Suppression of metal-insulator transition in VO2 by electric field–induced oxygen vacancy formation Science. 339. 6126. 1402-1405.
[13]	Masina, Bathusile N et al, 2015. Optimizing the synthesis of vanadium–oxygen nanostructures by plasma plume dynamics using optical imaging. Optical Engineering .54.3 037106.
[14]	‏Fay Alexander, 2005. Engineering in vernetzten, offenen, durchgängigen Systemen (Engineering in Linked and Open Systems). at-Automatisierungstechnik. 53.4-5 205-210.
[15]	Yimam, E, 2015. Fabrication of Vanadium Oxide Nanoparticles by Pulsed Laser Ablation.‏
[16]	Chan, K. Y., & Teo, B. S, 2007. Effect of Ar pressure on grain size of magnetron sputter-deposited Cu thin films. IET Science, Measurement & Technology. 1(2) 87-90.
[17]	Koduru et al G, 2013. Spectroscopic and electrochromic properties of activated reactive evaporated nano-crystalline V 2 O 5 thin films grown on flexible substrates. International Nano Letters. 3(1) 24.
[18]	Cui, et al, 2008. Thermochromic properties of vanadium oxide films prepared by dc reactive magnetron sputtering. Thin Solid Films. 516(7), 1484-1488.
[19]	Prajapati, C. S., & Sahay, P. P, 2013. Influence of In doping on the structural, optical and acetone sensing properties of ZnO nanoparticulate thin films. Materials Science in Semiconductor Processing .16(1) 200-210.
[20]	S. C. Gadkari, et al, 2005 Solid state sensors for toxic gases", Technical physics and prototype Engineering Division Bhabha Atomic Research Centre. 49.
[21]	N. G. Deshpandea, et al, 2009. Studies on tin oxide-intercalated polyaniline nanocomposite for ammonia gas sensing applications", Sensor and Actuators B. 138 76-84.
[22]	Cerqueira et al, 1995. Microcrystalline silicon thin films prepared by RF reactive magnetron sputter deposition. Vacuum. 46(12) 1385-1390.
[23]	Nag, J., Haglund, R., & Payzant, A, 2011. Effects of growth temperature on epitaxial thin films of vanadium dioxide grown by pulsed laser deposition. In CLEO: Applications and Technology Optical Society of America.p. AMA5 ‏
[24]	Berezina, et al, 2015. Vanadium oxide thin films and fibers obtained by acetylacetonate sol-gel method. Thin Solid Films. 574 15-19‏.
[25]	Luo et al, 2014. Effects of thickness on the nanocrystalline structure and semiconductor-metal transition characteristics of vanadium dioxide thin films. Thin Solid Films. 550, 227-232.
[26]	Chen et al, 2017 Effects of annealing on thermochromic properties of W-doped vanadium dioxide thin films deposited by electron beam evaporation. Thin Solid Films. 644, 52-56‏.