%0 Journal Article
%T Using the Effect of Mechanical Stress on Doped Silicon as an Angular Movement Sensor for MOEMS/MEMS Micro Mirrors
%A Berko, D.
%A Diamand, Y.S.
%J American Journal of Electrical and Electronic Engineering
%V 2
%N 3
%P 88-91
%D 2014
%M doi:10.12691/ajeee-2-3-5
%U http://pubs.sciepub.com/ajeee/2/3/5